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苏州晶拓半导体科技有限公司

华体会hth体育


华体会hth体育-专为半导体工艺设计
Ultra pure and high concentration plate type ozone
generator – designed for semiconductor
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产品详情

● 超纯的臭氧气体:极低的金属杂质含量,低至ppt级别;

● Ultra clean Ozone gas: Extremely low level metal contaminations, low to ppt level;

● 高可靠性与重复性;

● High reliability and Excellent repeatability;

● 双面放电双面冷却技术,提高放电效率;

● Double side discharging and cooling technology,improve discharging efficiency;

● 高臭氧气体浓度,可达350g/m3以上;

● High ozone concentration, ≥350g/m3;

● 高气体流通压力,可达3bar以上;

● High delivery Ozone pressure; up to 3 bar;

● 流量可达36slm以上,适合于最新的CVD系统;

● High flow up to 36slm, applied to newest CVD system;



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